- Metrology at 0.2nm resolution
- Identification of nm-sized defects on integrated circuits, including embedded particles and via residues
- Determination of crystallographic phases at the nanometer scale
- Nanoparticle characterization: Size, Core/shell investigations, agglomeration, effects of annealing…
- Catalyst studies
- Nanometer scale elemental maps
- III-V super lattice characterization
- Crystal defect characterization (dislocations, grain boundaries, voids, stacking faults)