Optical Profilometry (OP)
Optical profilometry (OP) is a non-contact interferometric-based method for characterizing surface topography. A typical optical profilometer analysis provides 2D and 3D images for surface analysis, numerous roughness statistics, and feature dimensions. In addition to these standard measurements, EAG can also perform many advanced optical profilometry analyses with a state-of-the-art Bruker Contour GTX-8 3D optical microscope. These include:
- Analysis automation for high-throughput measurements of several hundred features on a single sample, such as patterned wafers or die features
- Thickness determination of transparent, continuous films
OP is suitable for numerous applications and sample types because it can accommodate many sample geometries, offering a wide range of possible analytical dimensions and a versatile Z-range, covering a broad range of potential surface roughnesses. EAG is committed to working with our clients to develop unique approaches for characterizing the topographies of even the most challenging samples with our 3D optical microscopy capabilities.