Technical Leadership

 Temel Büyüklimanli博士 高级主管,四极次级离子质谱法

Dr. Temel Büyüklimanli
Senior Director, Quad SIMS

Dr. Büyüklimanli joined Evans Analytical Group (EAG) in 1994 as a SIMS analyst after being a Research Scientist in the Materials Characterization Laboratory of The Pennsylvania State University, University Park, Pennsylvania, from 1992-1994. Dr. Büyüklimanli graduated from Middle East Technical University, in Ankara Turkey, with a BS degree in Physics. He received his M.S. and Ph.D. degrees from University of Florida, Departments of Physics and Materials Science & Engineering in 1988 and 1992, respectively.

Dr. Büyüklimanli has authored several journal articles and given numerous lectures on surface characterization of ceramic and semiconductor materials. He has worked with other SIMS scientists to develop new analytical techniques to address emerging semiconductor technology needs. Most significant have been the PCOR-SIMSSM protocols for accurate dopant/impurity and compositional characterization in ULE implants, SiGe and III-V materials. He led the project for a new software to perform sophisticated SIMS data processing, which is currently being used in EAG Quadrupole SIMS group. His current research interests include the development of new methods for accurate characterization of ultra shallow dopant distributions, multi-component material structures for dopant, impurity and matrix concentrations, and layer thicknesses, by PCOR-SIMSSM. He is currently the director of Quadrupole SIMS group and a scientific fellow at EAG.